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10 um laser point for microlithography

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Hello,

I would need microlithography system. So I was thinking of using my cnc machine and mount a laser to it. The problem is that I dont know what laser to chose. I will be using positiv 20 photoresist wich cures at 405 nm wavelength and needs exposure strength of 100 mJ/cm² for 10s at 8 um film thickness. I would like to have 10 um laser point. Is something like this even achievable ? What components do I need to use ?

Thanks for help.

Best regards Martin.

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